Park NX-Hivac enables materials scientific research that requires high accuracy and high resolution measurements in a vacuum environment free from oxygen and other agents.
Closed-loop XY and Z Scanners.
Two independent closed-loop XY and Z flexure scanners for the sample and probe tip. The NX-Hivac offers flat and orthogonal XY scanning with low residual bow, offering out of plane motion less than 1 nm over the entire scan range.
A high speeds Z scanner with a 15 μm scan range and Z scanner non-linearity is less than 0.5%. This provides accurate 2D and 3D measurements with no need for software processing.
High vacuum is controlled by Hivac Manger, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you would not need to worry about the sequence of vacuum operation after click on a button.
The NX-Hivac features a range of tools that minimize the required input from the user.
Although the NX-Hivac is the world’s most accurate high performance AFM, it is also one of the easiest to use and convenient AFMs for failure analysis applications.