The leading automated nanometrology tool for 300 mm wafer measurement and analysis
Park NX20 300mm is the industry’s first large sample AFM that supports a full motorized traveling range of 300 mm x 300 mm. The entire 300 mm wafer area can be analyzed for low-noise AFM measurements
Supports a wide range of wafer sizes, shapes, and types allowing users to accurately scan practically any sample.
The NX20-300mm model is already the best choice for FA, QA, and QC engineers that need its unparalleled ease of use and automation without compromising on accuracy.
Has the ability to measure roughness, height and depth, perform defect reviews, electrical and magnetic failure analyses, thermal property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.