XE15 AFM

Power and versatility, brilliantly combined. For samples up to 150 mm x 150 mm.

Ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.

Unique MultiSampleā„¢ scan boosts research productivity

  • ability to image and measure multiple samples in one pass.
  • allows you to scan the samples under identical environmental conditions.
  • Specially designed multi-sample chuck for the loading of up to 16 individual samples
  • Fully motorized XY sample stage travels up to 150 mm x 150 mm. Also able to run step-and-scan automation.

Large sample size increases possibilities

  • Park XE15 can scan a sample of up to 150 mm x 150 mm.

Features adaptable to any need – suited to shared labs with a wide range of individual requirements.
Supports a wide range SPM modes/options