Contact Profilers

A complete range of surface metrology capabilities to meet the needs of the engineering and research communities. The profilers take measurement to the next level, starting with step height, texture and stress analysis.
Alpha-Step D-500 Stylus Profiler-2D Profiler
  • Step Height: Nanometers to 1200µm
  • Low Force: 0.03 to 15mg
  • Video: 5MP high-resolution color camera
  • Keystone Correction: Removes distortion due to side view optics
  • Arc Correction: Removes error due to arc motion of the stylus
  • Compact Size: Smallest system footprint for a benchtop stylus profiler
  • Software: User friendly software interface

Applications:
  • Step Height: 2D step height
  • Texture: 2D roughness and waviness
  • Form: 2D bow and shape
  • Stress: 2D thin film stress

Alpha-Step D-600 Stylus Profiler
  • Step Height: Nanometers to 1200µm
  • Low Force: 0.03 to 15mg
  • Video: 5MP high-resolution color camera
  • Keystone Correction: Removes distortion due to side view optics
  • Arc Correction: Removes error due to arc motion of the stylus
  • Compact Size: Small system footprint
  • Software: User friendly software interface

Applications:
  • Step Height: 2D and 3D step height
  • Texture: 2D and 3D roughness and waviness
  • Form: 2D bow and shape
  • Stress: 2D thin film stress

P-7 Stylus Profiler – for scans up to 150mm without stitching.
  • Step height: Nanometers to 1000µm
  • Low force with constant force control: 0.03 to 50mg
  • Scan full diameter of the sample without stitching
  • Video: 5MP high-resolution color camera
  • Arc correction: Removes error due to arc motion of the stylus
  • Software: Easy-to-use software interface
  • Fully automated with sequencing, pattern recognition and SECS/GEM

Applications:
  • Step height: 2D and 3D step height
  • Texture: 2D and 3D roughness and waviness
  • Form: 2D and 3D bow and shape
  • Stress: 2D and 3D thin film stress
  • Defect review: 2D and 3D defect surface topography

P-17 Stylus Profiler – for scans up to 200mm without stitching.

  • Step height: Nanometers to 1000µm
  • Low force with constant force control: 0.03 to 50mg
  • Scan full diameter of the sample without stitching
  • Video: 5MP high-resolution color camera
  • Arc correction: Removes error due to arc motion of the stylus
  • Software: Easy-to-use software interface
  • Fully automated with sequencing, pattern recognition and SECS/GEM

Applications:
  •  Step height: 2D and 3D step height
  • Texture: 2D and 3D roughness and waviness
  • Form: 2D and 3D bow and shape
  • Stress: 2D and 3D thin film stress
  • Defect review: 2D and 3D defect surface topography