Spectroscopic Ellipsometers

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement. It has a strong products line, such as the portable type, the automatic stage type, and the built-in type etc.

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Producer: ULVAC, Japan »

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UNECS-Portable (Portable), High-speed Spectroscopic Ellipsometer

High-speed Measurement:the snapshot measurement method is realized and the high-speed measurement is 20ms per point.
Visible Spectral Range :the spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
Compact Sensor Unit :the sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.

Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

UNECS-1500M (Manual Stage), High-speed Spectroscopic Ellipsometer

High-speed Measurement:the snapshot measurement method is realized and the high-speed measurement is 20ms per point.
Visible Spectral Range :the spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
Compact Sensor Unit :the sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.

Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

UNECS-1500A/2000A/3000A (Auto Mapping Stage)- High-speed Spectroscopic Ellipsometer

3 models are available for φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
High-speed Measurement:the snapshot measurement method is realized and the high-speed measurement is 20ms per point.
Visible Spectral Range :the spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
Compact Sensor Unit :the sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.
Measurement time-Sampling : 20ms to 3000ms Analyzing time : 300ms

Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

UNECS-1M (Integration)- High-speed Spectroscopic Ellipsometer

UNECS-1M, the light weight and compact design sensor head, is capable to be integrated into various equipments. It is suitable for both of vacuum and atmospheric pressure environments

High-speed Measurement:the snapshot measurement method is realized and the high-speed measurement is 20ms per point.
Visible Spectral Range :the spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
Compact Sensor Unit :the sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.

Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

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