A complete range of surface metrology capabilities to meet the needs of the engineering and research communities. The profilers take measurement to the next level, starting with step height, texture and stress analysis.
Benchtop optical profiler is a non-contact, 3D surface topography measurement system.
The system is powered by patented ZDot™ technology and Multi-Mode optics
Easy to use optical profiler with ZDot and Multi-Mode optics to address a wide range of applications
High-quality microscope for sample review or defect inspection
ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
ZXI: White light interferometry for wide area measurements with high z resolution
ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
ZSI: Shearing interferometry for images with high z resolution
ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
AOI: Automatic optical inspection to quantify defects on the sample
Production capability: Fully automated measurements with sequencing and pattern recognition
Applications:
Step height: 3D step height from nanometers to millimeters
Texture: 3D roughness and waviness on smooth to very rough surfaces
Form: 3D bow and shape
Stress: 2D thin film stress
Film thickness: transparent film thickness from 30nm to 100µm
Defect inspection: capture defects greater than 1µm
Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations
ZETA-300 Optical Profiler
3D metrology and imaging capability, combined with an integrated isolation table and configuration flexibility to handle larger samples
Easy to use optical profiler with ZDot and Multi-Mode optics to address a wide range of applications
High-quality microscope for sample review or defect inspection
ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
ZXI: White light interferometry for wide area measurements with high z resolution
ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
ZSI: Shearing interferometry for images with high z resolution
ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
AOI: Automatic optical inspection to quantify defects on the sample
Production capability: Fully automated measurements with sequencing and pattern recognition
Applications:
Step height: 3D step height from nanometers to millimeters
Texture: 3D roughness and waviness on smooth to very rough surfaces
Form: 3D bow and shape
Stress: 2D thin film stress
Film thickness: transparent film thickness from 30nm to 100µm
Defect inspection: capture defects greater than 1µm
Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations
