Optical Profilers

A complete range of surface metrology capabilities to meet the needs of the engineering and research communities. The profilers take measurement to the next level, starting with step height, texture and stress analysis.

ZETA-20 Optical Profiler
Benchtop optical profiler is a non-contact, 3D surface topography measurement system.
The system is powered by patented ZDot™ technology and Multi-Mode optics
  • Easy to use optical profiler with ZDot and Multi-Mode optics to address a wide range of applications
  • High-quality microscope for sample review or defect inspection
  • ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
  • ZXI: White light interferometry for wide area measurements with high z resolution
  • ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
  • ZSI: Shearing interferometry for images with high z resolution
  • ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
  • AOI: Automatic optical inspection to quantify defects on the sample
  • Production capability: Fully automated measurements with sequencing and pattern recognition

Applications:
  • Step height: 3D step height from nanometers to millimeters
  • Texture: 3D roughness and waviness on smooth to very rough surfaces
  • Form: 3D bow and shape
  • Stress: 2D thin film stress
  • Film thickness: transparent film thickness from 30nm to 100µm
  • Defect inspection: capture defects greater than 1µm
  • Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations

ZETA-300 Optical Profiler
3D metrology and imaging capability, combined with an integrated isolation table and configuration flexibility to handle larger samples
  • Easy to use optical profiler with ZDot and Multi-Mode optics to address a wide range of applications
  • High-quality microscope for sample review or defect inspection
  • ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
  • ZXI: White light interferometry for wide area measurements with high z resolution
  • ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
  • ZSI: Shearing interferometry for images with high z resolution
  • ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
  • AOI: Automatic optical inspection to quantify defects on the sample
  • Production capability: Fully automated measurements with sequencing and pattern recognition

Applications:
  • Step height: 3D step height from nanometers to millimeters
  • Texture: 3D roughness and waviness on smooth to very rough surfaces
  • Form: 3D bow and shape
  • Stress: 2D thin film stress
  • Film thickness: transparent film thickness from 30nm to 100µm
  • Defect inspection: capture defects greater than 1µm
  • Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations